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Silicon Micromachining: Electrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring (Adv. Funct. Mater. 6/2012)
(Advanced Functional Materials) Wednesday March 14th 2012
Author(s): Margherita Bassu, Salvatore Surdo, Lucanos Marsilio Strambini, Giuseppe Barillaro,
DOI:10.1002/adfm.201290036

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